Dec 21, 2024  
2010-2011 Academic Catalog 
    
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2010-2011 Academic Catalog [Published Catalog]

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NANO 521 - MEMS/NEMS Technology and Devices

This course will cover basic MEMS/NEMS fabrication technologies, various transduction mechanisms such as piezoelectric, pyroelectric, thermoelectric, thermionic, piezoresistive, etc. In addition, the theory of operation of few sensors will be covered this will include infrared detectors, radiation sensors, rotation and acceleration sensors, flow sensors, pressure and force sensors, and motion sensors. Finally, the course will give insight of different techniques for analyzing experimental data.
 
Prerequisites
NANO 504.
Cross-listed
Same as PHYS 556.
(3 cr.)


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