Jun 21, 2024  
2021-2022 Academic Catalog 
2021-2022 Academic Catalog [Published Catalog]

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NANO 521/5221 - MEMS/NEMS Technology and Devices (3 cr.)

Consent of instructor.

Basic MEMS/NEMS fabrication technologies, various transduction mechanisms such as piezoelectric, pyroelectric, thermoelectric, thermionic, piezoresistive, etc. The theory of operation of few sensors including infrared detectors, radiation sensors, rotation and acceleration sensors, flow sensors, pressure and force sensors, and motion sensors. An introduction to different techniques for analyzing experimental data.

Same as  ,  .
When Offered
Offered in fall

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