Jun 24, 2024  
2020-2021 Academic Catalog 
2020-2021 Academic Catalog [Published Catalog]

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ECNG 415/4105 - Integrated Circuit Fabrication: Materials and Processes (3 cr.)


Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS.

When Offered
Offered occasionally.

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