Oct 04, 2023  
2015-2016 Academic Catalog 
2015-2016 Academic Catalog [Published Catalog]

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PHYS 556/5277 - MEMS/NEMS Technology and Devices (3 cr.)

Consent of instructor.

Basic MEMS/NEMS fabrication technologies, various transduction mechanisms such as piezoelectric, pyroelectric, thermoelectric, thermionic, piezoresistive, etc. The theory of operation of few sensors including infrared detectors, radiation sensors, rotation and acceleration sensors, flow sensors, pressure and force sensors, and motion sensors. An introduction to different techniques for analyzing experimental data.


Same as NANO 5221  ,RCSS 5242  .
When Offered
Offered in fall.

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