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Nov 08, 2024
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NANO 521/5221 - MEMS/NEMS Technology and Devices (3 cr.)
Prerequisites
Consent of instructor.
Description
Basic MEMS/NEMS fabrication technologies, various transduction mechanisms such as piezoelectric, pyroelectric, thermoelectric, thermionic, piezoresistive, etc. The theory of operation of few sensors including infrared detectors, radiation sensors, rotation and acceleration sensors, flow sensors, pressure and force sensors, and motion sensors. An introduction to different techniques for analyzing experimental data.
Cross-listed
Same as , .
When Offered
Offered in fall
Check course scheduling information
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