May 16, 2022  
2013-2014 Academic Catalog 
2013-2014 Academic Catalog [Published Catalog]

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PHYS 556/5277 - MEMS/NEMS Technology and Devices (3 cr.)

   and consent of instructor.

This course will cover basic MEMS/NEMS fabrication technologies, various transduction mechanisms such as piezoelectric, pyroelectric, thermoelectric, thermionic, piezoresistive, etc. In addition, the theory of operation of few sensors will be covered this will include infrared detectors, radiation sensors, rotation and acceleration sensors, flow sensors, pressure and force sensors, and motion sensors. Finally, the course will give insight of different techniques for analyzing experimental data.


Same as

 , .
When Offered
Offered in spring.

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