Mar 28, 2024  
2013-2014 Academic Catalog 
    
2013-2014 Academic Catalog [Published Catalog]

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EENG 415/4105 - Integrated Circuit Fabrication: Materials and Processes (3 cr.)



Prerequisites
 

Description
Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS.

When Offered
Offered occasionally.



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