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May 01, 2024
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EENG 415 - Integrated Circuit Fabrication: Materials and Processes Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS. Prerequisites Prerequisite: EENG 316. When Offered Offered occasionally. (3 cr.)
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